Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor Manufacturing

Adaptive Abstraction-Level Conversion Framework for Accelerated Discrete-Event Simulation in Smart Semiconductor Manufacturing

Speeding up the simulation of discrete-event wafer-fabrication models is essential for fast decision-making to handle unexpected events in smart semiconductor manufacturing because decision-parameter optimization requires repeated simulation execution based on the current manufacturing situation. In...

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Bibliographic Details
Main Authors: Moon Gi Seok, Wentong Cai, Hessam S. Sarjoughian, Daejin Park
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Access
Subjects:
Abstraction-level conversion
wafer fabrication
discrete-event modeling
smart manufacturing
Online Access:https://ieeexplore.ieee.org/document/9187270/

Internet

https://ieeexplore.ieee.org/document/9187270/

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