Fpga-based control of piezoelectric actuators
In many industrial applications like semiconductor production and optical inspection systems, the availability of positioning systems capable to follow trajectory paths in the range of several centimetres, featuring at the same time a nanometre-range precision, is demanding. Pure piezoelectric stage...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Faculty of Technical Sciences in Cacak
2011-01-01
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| Series: | Serbian Journal of Electrical Engineering |
| Subjects: | |
| Online Access: | http://www.doiserbia.nb.rs/img/doi/1451-4869/2011/1451-48691102181J.pdf |