Microfabricated Thin Film Impedance Sensor & AC Impedance Measurements
Thin film microfabrication technique was employed to fabricate a platinum based parallel-electrode structured impedance sensor. Electrochemical impedance spectroscopy (EIS) and equivalent circuit analysis of the small amplitude (±5 mV) AC impedance measurements (frequency range: 1 MHz to 0.1 Hz) at...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2010-06-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/10/6/5845/ |