Síntesis de materiales cerámicos mediante técnicas químicas en fase vapor (CVD)
Chemical vapour deposition (CVD) has been successfully used for the synthesis of a large variety of compounds. Initially the technique was developed for microelectronic applications and then was widespread used for the preparation of hard coatings, optoelectronic and superconductor materials. Among...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2003-02-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/653/679 |