Design and Performance of a Focus-Detection System for Use in Laser Micromachining

We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locati...

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Bibliographic Details
Main Authors: Binh Xuan Cao, Munju Bae, Hyonkee Sohn, Jiyeon Choi, Youngduk Kim, Jeng-o Kim, Jiwhan Noh
Format: Article
Language:English
Published: MDPI AG 2016-01-01
Series:Micromachines
Subjects:
Online Access:http://www.mdpi.com/2072-666X/7/1/2