The Study of DLC and Si-DLC Based Coatings and Their Mechanical Properties
In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal str...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taiwan Association of Engineering and Technology Innovation
2013-04-01
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| Series: | International Journal of Engineering and Technology Innovation |
| Subjects: | |
| Online Access: | http://sparc.nfu.edu.tw/~ijeti/download/V3-no2-104-113.pdf |