Optical parameters induced by phase transformation in RF magnetron sputtered TiO2 nanostructured thin films

Optical parameters induced by phase transformation in RF magnetron sputtered TiO2 nanostructured thin films

Pure TiO2 thin films were deposited onto quartz substrates using a ceramic TiO2 target at an elevated substrate temperature of 573 K by RF magnetron sputtering, and an analysis of structural, optical and photoluminescence characteristics of the films upon phase transformation is reported in this pap...

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Bibliographic Details
Main Authors: Prabitha B. Nair, V.B. Justinvictor, Georgi P. Daniel, K. Joy, K.C. James Raju, David Devraj Kumar, P.V. Thomas
Format: Article
Language:English
Published: Elsevier 2014-06-01
Series:Progress in Natural Science: Materials International
Subjects:
RF magnetron sputtering
TiO2 thin films
Dislocation density
Optical conductivity
Photoluminescence
Online Access:http://www.sciencedirect.com/science/article/pii/S100200711400063X

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http://www.sciencedirect.com/science/article/pii/S100200711400063X

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