Modelling of damping forces occuring in simple MEMS systems
A certain damping force occurs in the micro-mechanical systems referred as MEMS. At the design stage of such systems, these forces must be accurately estimated. As shown in this work, in all systems operating at low frequencies, most important force is the one associated with the flotation of air fi...
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| Format: | Article |
| Language: | English |
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Wojskowa Akademia Techniczna, Redakcja Wydawnictw WAT, ul. gen. S. Kaliskiego 2, 00-908 Warszawa
2015-12-01
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| Series: | Biuletyn Wojskowej Akademii Technicznej |
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| Online Access: | http://biuletynwat.pl/icid/1186348 |