INVESTIGATION OF THE SPUTTERING CONDITIONS ON THE DEPOSITION OF THE NbN THIN FILMS ONTO GLASS AND Si/SiO SUBSTRATES /
NbN thin films are very useful superconducting materials for the electronic devices. Using sputter deposition technique is a cheap alternative to produce of NbN thin films on glass or SiO for the technology applications. The NbN films was coated on glass and SiO/Si substrates by DC magnetron sputter...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
National Defense University Barbaros Naval Sciences and Engineering Institute Journal of Naval Science and Engineering
2020-04-01
|
| Series: | Journal of Naval Science and Engineering |
| Subjects: | |
| Online Access: | http://static.dergipark.org.tr/article-download/90cf/d7f9/5ca7/5ea940f477171.pdf? |