Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures

Micro-electromechanical systems (MEMS) magnetic sensing at high temperatures over 573 K has not been achieved due to the difficulty in designing the rational interface with strong coupling. Here, a magnetic sensor based on FeGa/single-crystal diamond (SCD) MEMS resonator is realized to circumvent th...

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Bibliographic Details
Main Authors: Zilong Zhang, Yuanzhao Wu, Liwen Sang, Haihua Wu, Jian Huang, Linjun Wang, Yukiko Takahashi, Runwei Li, Satoshi Koizumi, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Meiyong Liao
Format: Article
Language:English
Published: Taylor & Francis Group 2020-05-01
Series:Materials Research Letters
Subjects:
single-crystal diamond
galfenol (fega)
magnetostrictive effect
mems
Online Access:http://dx.doi.org/10.1080/21663831.2020.1734680

Internet

http://dx.doi.org/10.1080/21663831.2020.1734680

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