Input Shaping Based on an Experimental Transfer Function for an Electrostatic Microscanner in a Quasistatic Mode

This paper describes an input shaping method based on an experimental transfer function to effectively obtain a desired scan output for an electrostatic microscanner driven in a quasistatic mode. This method features possible driving extended to a higher frequency, whereas the conventional control n...

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Bibliographic Details
Main Authors: Kwanghyun Kim, Seunghwan Moon, Jinhwan Kim, Yangkyu Park, Jong-Hyun Lee
Format: Article
Language:English
Published: MDPI AG 2019-03-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/10/4/217