Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review
Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninv...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/12/4/465 |