An Integrated Thermal Compensation System for MEMS Inertial Sensors

An Integrated Thermal Compensation System for MEMS Inertial Sensors

An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, impleme...

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Bibliographic Details
Main Authors: Sheng-Ren Chiu, Li-Tao Teng, Jen-Wei Chao, Chung-Yang Sue, Chih-Hsiou Lin, Hong-Ren Chen, Yan-Kuin Su
Format: Article
Language:English
Published: MDPI AG 2014-03-01
Series:Sensors
Subjects:
MEMS
gyroscope
silicon-on-glass
temperature bias drift
delta-sigma modulation
thermal compensation
Online Access:http://www.mdpi.com/1424-8220/14/3/4290

Internet

http://www.mdpi.com/1424-8220/14/3/4290

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