Advances in Capacitive Micromachined Ultrasonic Transducers

Advances in Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial suc...

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Bibliographic Details
Main Authors: Kevin Brenner, Arif Sanli Ergun, Kamyar Firouzi, Morten Fischer Rasmussen, Quintin Stedman, Butrus (Pierre) Khuri–Yakub
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Series:Micromachines
Subjects:
capacitive micromachined ultrasonic transducer (CMUT)
acoustics
micromachining
capacitive
transducer
modelling
fabrication
Online Access:https://www.mdpi.com/2072-666X/10/2/152

Internet

https://www.mdpi.com/2072-666X/10/2/152

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