Advances in Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial suc...

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Main Authors:	Kevin Brenner, Arif Sanli Ergun, Kamyar Firouzi, Morten Fischer Rasmussen, Quintin Stedman, Butrus (Pierre) Khuri–Yakub
Format:	Article
Language:	English
Published:	MDPI AG 2019-02-01
Series:	Micromachines
Subjects:	capacitive micromachined ultrasonic transducer (CMUT) acoustics micromachining capacitive transducer modelling fabrication
Online Access:	https://www.mdpi.com/2072-666X/10/2/152

id	doaj-3c29fcef7f59400e888b892521dbd5b0
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spelling	doaj-3c29fcef7f59400e888b892521dbd5b02020-11-24T21:35:55ZengMDPI AGMicromachines2072-666X2019-02-0110215210.3390/mi10020152mi10020152Advances in Capacitive Micromachined Ultrasonic TransducersKevin Brenner0Arif Sanli Ergun1Kamyar Firouzi2Morten Fischer Rasmussen3Quintin Stedman4Butrus (Pierre) Khuri–Yakub5E.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USAE.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USAE.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USAE.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USAE.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USAE.L. Ginzton Lab., Stanford University, Stanford, CA 94305, USACapacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.https://www.mdpi.com/2072-666X/10/2/152capacitive micromachined ultrasonic transducer (CMUT)acousticsmicromachiningcapacitivetransducermodellingfabrication
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Kevin Brenner Arif Sanli Ergun Kamyar Firouzi Morten Fischer Rasmussen Quintin Stedman Butrus (Pierre) Khuri–Yakub
spellingShingle	Kevin Brenner Arif Sanli Ergun Kamyar Firouzi Morten Fischer Rasmussen Quintin Stedman Butrus (Pierre) Khuri–Yakub Advances in Capacitive Micromachined Ultrasonic Transducers Micromachines capacitive micromachined ultrasonic transducer (CMUT) acoustics micromachining capacitive transducer modelling fabrication
author_facet	Kevin Brenner Arif Sanli Ergun Kamyar Firouzi Morten Fischer Rasmussen Quintin Stedman Butrus (Pierre) Khuri–Yakub
author_sort	Kevin Brenner
title	Advances in Capacitive Micromachined Ultrasonic Transducers
title_short	Advances in Capacitive Micromachined Ultrasonic Transducers
title_full	Advances in Capacitive Micromachined Ultrasonic Transducers
title_fullStr	Advances in Capacitive Micromachined Ultrasonic Transducers
title_full_unstemmed	Advances in Capacitive Micromachined Ultrasonic Transducers
title_sort	advances in capacitive micromachined ultrasonic transducers
publisher	MDPI AG
series	Micromachines
issn	2072-666X
publishDate	2019-02-01
description	Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.
topic	capacitive micromachined ultrasonic transducer (CMUT) acoustics micromachining capacitive transducer modelling fabrication
url	https://www.mdpi.com/2072-666X/10/2/152
work_keys_str_mv	AT kevinbrenner advancesincapacitivemicromachinedultrasonictransducers AT arifsanliergun advancesincapacitivemicromachinedultrasonictransducers AT kamyarfirouzi advancesincapacitivemicromachinedultrasonictransducers AT mortenfischerrasmussen advancesincapacitivemicromachinedultrasonictransducers AT quintinstedman advancesincapacitivemicromachinedultrasonictransducers AT butruspierrekhuriyakub advancesincapacitivemicromachinedultrasonictransducers
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Advances in Capacitive Micromachined Ultrasonic Transducers

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