Development of a XYθz 3-DOF nanopositioning stage with linear displacement amplification device
The main purpose of this study is to develop a XYθZ 3-DOF nanopositioning stage with linear displacement amplification device. This stage is used by three groups of linear displacement amplification device to composition, and thus achieves precise XYθZ 3-DOF movement. The linear displacement amplifi...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2017-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201712300006 |