Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment
Nanopatterning of solid surfaces by low-energy ion bombardment has received considerable interest in recent years. This interest was partially motivated by promising applications of nanopatterned substrates in the production of functional surfaces. Especially nanoscale ripple patterns on Si surfaces...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2010-10-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1996-1944/3/10/4811/ |