Plasma-Induced Wafer-Scale Self-Assembly of Silver Nanoparticles and Application to Biochemical Sensing
In this work, the wafer-scale silver nanoparticles fabricated by a self-assembly method was demonstrated based on a magnetron sputtering and plasma treatment process. Silver nanoparticles of different sizes and shapes were prepared, and the effects of the plasma treatment time, plasma gas compositio...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2015-06-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1996-1944/8/7/3806 |