Plasma-Induced Wafer-Scale Self-Assembly of Silver Nanoparticles and Application to Biochemical Sensing

In this work, the wafer-scale silver nanoparticles fabricated by a self-assembly method was demonstrated based on a magnetron sputtering and plasma treatment process. Silver nanoparticles of different sizes and shapes were prepared, and the effects of the plasma treatment time, plasma gas compositio...

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Bibliographic Details
Main Authors: Yunbo Shi, Hao Guo, Jiangtao Yang, Miaomiao Zhao, Jun Liu, Chenyang Xue, Jun Tang
Format: Article
Language:English
Published: MDPI AG 2015-06-01
Series:Materials
Subjects:
Online Access:http://www.mdpi.com/1996-1944/8/7/3806

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