Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function

This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate...

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Bibliographic Details
Main Authors: Xin Wang, Lining Sun, Yunbo Shi
Format: Article
Language:English
Published: Hindawi Limited 2020-01-01
Series:Journal of Sensors
Online Access:http://dx.doi.org/10.1155/2020/8897916