Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function
This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate...
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doaj-3dcbc6a544644394bf609e6bed50d9ee2020-11-30T09:11:28ZengHindawi LimitedJournal of Sensors1687-725X1687-72682020-01-01202010.1155/2020/88979168897916Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation FunctionXin Wang0Lining Sun1Yunbo Shi2The Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, School of Measurement-Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaThe Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, School of Measurement-Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaThe Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, School of Measurement-Control Tech & Communications Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaThis paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate for the solution temperature, the chip was also designed with a sandwich, plate-type serpentine Pt resistance heater. The experimental results showed that the pH sensor had a high sensitivity of 0.288 mA/pH with good linearity (R2=0.9998), the sensitivity of the temperature sensor was 0.949 Ω/°C, the sensitivity of the ammonia nitrogen sensor was 0.1139 mA/ppm, the sensitivity of the dissolved oxygen (DO) sensor was 2.22 μA/ppm, and the sensitivity of the temperature changes with respect to the heater power was 0.3126°C/mW. Compared with a single water quality parameter sensor, the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and had a good temperature compensation effect. Moreover, the sensor chip was small in size, rugged, and highly accurate.http://dx.doi.org/10.1155/2020/8897916 |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Xin Wang Lining Sun Yunbo Shi |
spellingShingle |
Xin Wang Lining Sun Yunbo Shi Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function Journal of Sensors |
author_facet |
Xin Wang Lining Sun Yunbo Shi |
author_sort |
Xin Wang |
title |
Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function |
title_short |
Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function |
title_full |
Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function |
title_fullStr |
Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function |
title_full_unstemmed |
Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function |
title_sort |
research on a miniature multiparameter water quality sensor chip and a system with a temperature compensation function |
publisher |
Hindawi Limited |
series |
Journal of Sensors |
issn |
1687-725X 1687-7268 |
publishDate |
2020-01-01 |
description |
This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate for the solution temperature, the chip was also designed with a sandwich, plate-type serpentine Pt resistance heater. The experimental results showed that the pH sensor had a high sensitivity of 0.288 mA/pH with good linearity (R2=0.9998), the sensitivity of the temperature sensor was 0.949 Ω/°C, the sensitivity of the ammonia nitrogen sensor was 0.1139 mA/ppm, the sensitivity of the dissolved oxygen (DO) sensor was 2.22 μA/ppm, and the sensitivity of the temperature changes with respect to the heater power was 0.3126°C/mW. Compared with a single water quality parameter sensor, the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and had a good temperature compensation effect. Moreover, the sensor chip was small in size, rugged, and highly accurate. |
url |
http://dx.doi.org/10.1155/2020/8897916 |
work_keys_str_mv |
AT xinwang researchonaminiaturemultiparameterwaterqualitysensorchipandasystemwithatemperaturecompensationfunction AT liningsun researchonaminiaturemultiparameterwaterqualitysensorchipandasystemwithatemperaturecompensationfunction AT yunboshi researchonaminiaturemultiparameterwaterqualitysensorchipandasystemwithatemperaturecompensationfunction |
_version_ |
1715027783975960576 |