Research on a Miniature Multiparameter Water Quality Sensor Chip and a System with a Temperature Compensation Function
This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hindawi Limited
2020-01-01
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| Series: | Journal of Sensors |
| Online Access: | http://dx.doi.org/10.1155/2020/8897916 |