Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings

Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings

Compared to aluminum nitride (AlN) with simple stoichiometry, lead zirconate titanate thin films (PZT) are the other promising candidate in advanced micro-electro-mechanical system (MEMS) devices due to their excellent piezoelectric and dielectric properties. The fabrication of PZT thin films with a...

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Bibliographic Details
Main Authors: Youcao Ma, Jian Song, Xubo Wang, Yue Liu, Jia Zhou
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Coatings
Subjects:
PZT thin films
magnetron sputtering
fabrication
microstructure
properties
Online Access:https://www.mdpi.com/2079-6412/11/8/944

Internet

https://www.mdpi.com/2079-6412/11/8/944

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