COMPENSATION OF MEASUREMENT ERRORS WHEN REDUCING LINEAR DIMENSIONS OF THE KELVIN PROBE

The study is based on results of modeling of measurement circuit containing vibrating-plate capacitor using a complex-harmonic analysis technique. Low value of normalized frequency of small-sized scanning Kelvin probe leads to high distortion factor of probe’s measurement signal that in turn leads t...

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Bibliographic Details
Main Authors: A. K. Tyavlovsky, A. L. Zharin
Format: Article
Language:English
Published: Belarusian National Technical University 2015-03-01
Series:Pribory i Metody Izmerenij
Subjects:
Online Access:https://pimi.bntu.by/jour/article/view/36