Giant piezoresistive effect by optoelectronic coupling in a heterojunction

Designing reliable and sensitive mechanical sensing technologies based on piezoresistive effect remains a challenge. Here, the authors propose an opto-electro-mechanical coupling strategy to enable giant piezoresistive effect in a highly doped 3C-SiC/Si heterojunction achieving a high GF of 58,000.

Bibliographic Details
Main Authors: Thanh Nguyen, Toan Dinh, Abu Riduan Md Foisal, Hoang-Phuong Phan, Tuan-Khoa Nguyen, Nam-Trung Nguyen, Dzung Viet Dao
Format: Article
Language:English
Published: Nature Publishing Group 2019-09-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-019-11965-5