Investigation of structural, optical and electrical properties of (Ti,Nb)Ox thin films deposited by high energy reactive magnetron sputtering
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
Sciendo
2014-09-01
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Series: | Materials Science-Poland |
Subjects: | |
Online Access: | https://doi.org/10.2478/s13536-013-0195-4 |