Activation of Zr, ZrVHf and TiZrV Non-Evaporative Getters Characterized by In Situ Synchrotron Radiation Photoemission Spectroscopy

Activation of Zr, ZrVHf and TiZrV Non-Evaporative Getters Characterized by In Situ Synchrotron Radiation Photoemission Spectroscopy

The activation process of Zr, ZrVHf and TiZrV non-evaporative getter (NEG) thin films, prepared by direct current magnetron sputtering, is investigated by in situ synchrotron radiation photoemission spectroscopy. The activation temperatures of Zr and ZrVHf films are found to be 300 °C and 200 °C, re...

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Bibliographic Details
Main Authors: Yuchen Yang, Yongsheng Ma, Jia’ou Wang, Tao Huang, Baiqi Liu, Fei Sun, Xujian Wang, Shuangkai Chen, Zilin Chen, Xiaohua Peng, Haiyi Dong, Ping He
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Applied Sciences
Subjects:
non-evaporative getters
activation
thin films
SRPES
Online Access:https://www.mdpi.com/2076-3417/11/11/4844

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https://www.mdpi.com/2076-3417/11/11/4844

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