Design of RF MEMS Switch with High Stability Effect at the Low Actuation Voltage
MEMS switches are one of the most promising future micro-machined products that have attracted numerous research efforts in recent years. This paper presents an innovative design of RF MEMS switch, with low actuation voltage (VT), improved mechanical stability and reduced stiction. The proposed swit...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2009-12-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | http://www.sensorsportal.com/HTML/DIGEST/december_09/P_540.pdf |