A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme

A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme

This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive tempera...

Full description

Bibliographic Details
Main Authors: Chia-Yen Lee, Dung-An Wang, Rong-Hua Ma, Tzu-Han Hsueh
Format: Article
Language:English
Published: MDPI AG 2009-07-01
Series:Sensors
Subjects:
cantilever
flow direction
flow sensor
MEMS
temperature compensation
Online Access:http://www.mdpi.com/1424-8220/9/7/5460/

Internet

http://www.mdpi.com/1424-8220/9/7/5460/

Similar Items