Closed-Loop Autofocus Scheme for Scanning Electron Microscope
In this paper, we present a full scale autofocus approach for scanning electron microscope (SEM). The optimal focus (in-focus) position of the microscope is achieved by maximizing the image sharpness using a vision-based closed-loop control scheme. An iterative optimization algorithm has been design...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
EDP Sciences
2015-01-01
|
Series: | MATEC Web of Conferences |
Online Access: | http://dx.doi.org/10.1051/matecconf/20153205003 |