Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology
The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2015-10-01
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Series: | Micromachines |
Subjects: | |
Online Access: | http://www.mdpi.com/2072-666X/6/10/1439 |