Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell...

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Bibliographic Details
Main Authors: Shih-Wen Peng, Po-Jen Shih, Ching-Liang Dai
Format: Article
Language:English
Published: MDPI AG 2015-10-01
Series:Micromachines
Subjects:
MEMS
energy harvester
thermoelectric
CMOS
Online Access:http://www.mdpi.com/2072-666X/6/10/1439

Internet

http://www.mdpi.com/2072-666X/6/10/1439

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