Vertically-aligned carbon nanotube at low pressure by cold-wall thermal CVD using a two-phase deposition step
This paper reports a new method to grow vertically-aligned carbon nanotubes (VA-CNT) in a cold-wall system, using a two-phase deposition step at low pressure. The first phase consists of the flow of NH3 for a short period together with the C2H2 flow to ensure catalyst activation. In the second phase...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-10-01
|
| Series: | Carbon Trends |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S266705692100064X |