An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multipar...
Main Authors: | , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2020-08-01
|
Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.11.111 |