An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multipar...
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doaj-4064dc41cac9445ca1e31302ca01b0302020-11-25T04:09:19ZengBeilstein-InstitutBeilstein Journal of Nanotechnology2190-42862020-08-011111272127910.3762/bjnano.11.1112190-4286-11-111An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterizationSantiago H. Andany0Gregor Hlawacek1Stefan Hummel2Charlène Brillard3Mustafa Kangül4Georg E. Fantner5Laboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, SwitzerlandInstitute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden 01328, GermanyGETec Microscopy GmbH, Vienna 1220, AustriaLaboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, SwitzerlandLaboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, SwitzerlandLaboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, SwitzerlandIn this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multiparametric nanoscale characterization. Combining the two techniques opens the way for unprecedented in situ correlative analysis at the nanoscale. Nanomachining and analysis can be performed without contamination of the sample and environmental changes between processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques. The AFM offers not only true 3D topography maps, something the HIM can only provide in an indirect way, but also allows for nanomechanical property mapping, as well as for electrical and magnetic characterization of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the integration.https://doi.org/10.3762/bjnano.11.111atomic force microscopy (afm)combined setupcorrelative microscopyhelium ion microscopy (him)self-sensing cantilevers |
collection |
DOAJ |
language |
English |
format |
Article |
sources |
DOAJ |
author |
Santiago H. Andany Gregor Hlawacek Stefan Hummel Charlène Brillard Mustafa Kangül Georg E. Fantner |
spellingShingle |
Santiago H. Andany Gregor Hlawacek Stefan Hummel Charlène Brillard Mustafa Kangül Georg E. Fantner An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization Beilstein Journal of Nanotechnology atomic force microscopy (afm) combined setup correlative microscopy helium ion microscopy (him) self-sensing cantilevers |
author_facet |
Santiago H. Andany Gregor Hlawacek Stefan Hummel Charlène Brillard Mustafa Kangül Georg E. Fantner |
author_sort |
Santiago H. Andany |
title |
An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization |
title_short |
An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization |
title_full |
An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization |
title_fullStr |
An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization |
title_full_unstemmed |
An atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization |
title_sort |
atomic force microscope integrated with a helium ion microscope for correlative nanoscale characterization |
publisher |
Beilstein-Institut |
series |
Beilstein Journal of Nanotechnology |
issn |
2190-4286 |
publishDate |
2020-08-01 |
description |
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multiparametric nanoscale characterization. Combining the two techniques opens the way for unprecedented in situ correlative analysis at the nanoscale. Nanomachining and analysis can be performed without contamination of the sample and environmental changes between processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques. The AFM offers not only true 3D topography maps, something the HIM can only provide in an indirect way, but also allows for nanomechanical property mapping, as well as for electrical and magnetic characterization of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the integration. |
topic |
atomic force microscopy (afm) combined setup correlative microscopy helium ion microscopy (him) self-sensing cantilevers |
url |
https://doi.org/10.3762/bjnano.11.111 |
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