Enhancement of Life Time of the Dimensionally Stable Anode for Copper Electroplating Applications

In order to enhance the long-term stability of DSA for copper electroplating process, in the present study, noble metal oxides with excellent electrochemical properties was used and optimum condition was determined the ratio of noble metal oxides, surface pre-treatment of titanium substrate and heat...

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Bibliographic Details
Main Authors: Son Seong Ho, Park Sung Cheol, Lee Man Seung
Format: Article
Language:English
Published: Polish Academy of Sciences 2017-06-01
Series:Archives of Metallurgy and Materials
Subjects:
Online Access:http://www.degruyter.com/view/j/amm.2017.62.issue-2/amm-2017-0145/amm-2017-0145.xml?format=INT