Thermoelectric Microsensor Based on Ultrathin Si Films

Thermoelectric Microsensor Based on Ultrathin Si Films

We show the use as a thermal photosensor of a thermoelectric (TE) microsensor based on ultrathin suspended Si films. The reduced thickness of the structural films enhances the extremely large thermal insulation of the sensing area (~43 µW/K), since phonons scatter in the surfaces, and guara...

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Bibliographic Details
Main Authors: Gustavo Gonçalves Dalkiranis, Pablo Ferrando-Villalba, Aitor Lopeandía-Fernández, Llibertat Abad-Muñoz, Javier Rodriguez-Viejo
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Proceedings
Subjects:
photosensor
thermoelectric effect and microsensor
Online Access:https://www.mdpi.com/2504-3900/2/13/1517

Internet

https://www.mdpi.com/2504-3900/2/13/1517

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