Physics of Discrete Impurities under the Framework of Device Simulations for Nanostructure Devices

Localized impurities doped in the semiconductor substrate of nanostructure devices play an essential role in understanding and resolving transport and variability issues in device characteristics. Modeling discrete impurities under the framework of device simulations is, therefore, an urgent need fo...

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Bibliographic Details
Main Authors: Nobuyuki Sano, Katsuhisa Yoshida, Chih-Wei Yao, Hiroshi Watanabe
Format: Article
Language:English
Published: MDPI AG 2018-12-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/11/12/2559