Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

Scandium Aluminium Nitride-Based Film Bulk Acoustic Resonators

Film bulk acoustic resonators (FBAR) are promising candidates to replace surface acoustic wave devices as filters or delay lines, but also offer exciting opportunities as biological or gas sensors. In this work, solidly mounted FBARs were manufactured by substituting commonly used pure aluminium nit...

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Bibliographic Details
Main Authors: Michael Schneider, Mario DeMiguel-Ramos, Andrew J. Flewitt, Enrique Iborra, Ulrich Schmid
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
film bulk acoustic resonator
FBAR
solidly mounted resonator
SMR
aluminium nitride
scandium aluminium nitride
electromechanical coupling factor
network analyser
Online Access:https://www.mdpi.com/2504-3900/1/4/305

Internet

https://www.mdpi.com/2504-3900/1/4/305

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