Design and Analysis of an Abbé Free Coplanar Stage
Design and analysis of a new Abbé free coplanar xy stage are presented in this paper. The xy stage is formed as conventional xy stages which combine with two stacked up linear guides. The x-guide is on the bottom and the y-guide is on top of the x-guide. The travel range of this xy stage is 300mm ×...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2017-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/20179507017 |