Silicon Nanowires Based Resistors for Bacteria Detection
Silicon nanowires (SiNWs) based resistors used as bacteria sensors are fabricated using the classical silicon technologies. SiNWs are grown by vapor liquid solid (VLS) method using gold as catalyst. Electrodes of the device are made of heavily in-situ doped polycristalline silicon. Results show pote...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-08-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/1/4/496 |