Phase-Modulated Standing Wave Interferometer

Standing wave interferometers (SWIs) show enormous potential for miniaturization because of their simple linear optical set-up, consisting only of a laser source, a measuring mirror and two standing wave sensors for obtaining quadrature signals. To reduce optical influences on the standing wave and...

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Bibliographic Details
Main Authors: Ingo Ortlepp, Eberhard Manske, Jens-Peter Zöllner, Ivo W. Rangelow
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Proceedings
Subjects:
Online Access:https://www.mdpi.com/2504-3900/56/1/12