Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping
This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, the driving and sensing parts of the gyroscope were...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/8/2/42 |