Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices

Advanced fabrication techniques enable a wide range of quantum devices, such as the realization of a topological qubit. Here, the authors introduce an on-chip fabrication technique based on shadow walls to implement topological qubits in an InSb nanowire without fabrication steps such as lithography...

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Main Authors:	Sebastian Heedt, Marina Quintero-Pérez, Francesco Borsoi, Alexandra Fursina, Nick van Loo, Grzegorz P. Mazur, Michał P. Nowak, Mark Ammerlaan, Kongyi Li, Svetlana Korneychuk, Jie Shen, May An Y. van de Poll, Ghada Badawy, Sasa Gazibegovic, Nick de Jong, Pavel Aseev, Kevin van Hoogdalem, Erik P. A. M. Bakkers, Leo P. Kouwenhoven
Format:	Article
Language:	English
Published:	Nature Publishing Group 2021-08-01
Series:	Nature Communications
Online Access:	https://doi.org/10.1038/s41467-021-25100-w

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spelling	doaj-4342ea1879844c8391fb3d3c53b330062021-08-15T11:39:53ZengNature Publishing GroupNature Communications2041-17232021-08-011211910.1038/s41467-021-25100-wShadow-wall lithography of ballistic superconductor–semiconductor quantum devicesSebastian Heedt0Marina Quintero-Pérez1Francesco Borsoi2Alexandra Fursina3Nick van Loo4Grzegorz P. Mazur5Michał P. Nowak6Mark Ammerlaan7Kongyi Li8Svetlana Korneychuk9Jie Shen10May An Y. van de Poll11Ghada Badawy12Sasa Gazibegovic13Nick de Jong14Pavel Aseev15Kevin van Hoogdalem16Erik P. A. M. Bakkers17Leo P. Kouwenhoven18QuTech and Kavli Institute of Nanoscience, Delft University of TechnologyMicrosoft Quantum Lab DelftQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyMicrosoft Quantum Lab DelftQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyAGH University of Science and Technology, Academic Centre for Materials and NanotechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyDepartment of Applied Physics, Eindhoven University of TechnologyDepartment of Applied Physics, Eindhoven University of TechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyMicrosoft Quantum Lab DelftMicrosoft Quantum Lab DelftDepartment of Applied Physics, Eindhoven University of TechnologyQuTech and Kavli Institute of Nanoscience, Delft University of TechnologyAdvanced fabrication techniques enable a wide range of quantum devices, such as the realization of a topological qubit. Here, the authors introduce an on-chip fabrication technique based on shadow walls to implement topological qubits in an InSb nanowire without fabrication steps such as lithography and etching.https://doi.org/10.1038/s41467-021-25100-w
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Sebastian Heedt Marina Quintero-Pérez Francesco Borsoi Alexandra Fursina Nick van Loo Grzegorz P. Mazur Michał P. Nowak Mark Ammerlaan Kongyi Li Svetlana Korneychuk Jie Shen May An Y. van de Poll Ghada Badawy Sasa Gazibegovic Nick de Jong Pavel Aseev Kevin van Hoogdalem Erik P. A. M. Bakkers Leo P. Kouwenhoven
spellingShingle	Sebastian Heedt Marina Quintero-Pérez Francesco Borsoi Alexandra Fursina Nick van Loo Grzegorz P. Mazur Michał P. Nowak Mark Ammerlaan Kongyi Li Svetlana Korneychuk Jie Shen May An Y. van de Poll Ghada Badawy Sasa Gazibegovic Nick de Jong Pavel Aseev Kevin van Hoogdalem Erik P. A. M. Bakkers Leo P. Kouwenhoven Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices Nature Communications
author_facet	Sebastian Heedt Marina Quintero-Pérez Francesco Borsoi Alexandra Fursina Nick van Loo Grzegorz P. Mazur Michał P. Nowak Mark Ammerlaan Kongyi Li Svetlana Korneychuk Jie Shen May An Y. van de Poll Ghada Badawy Sasa Gazibegovic Nick de Jong Pavel Aseev Kevin van Hoogdalem Erik P. A. M. Bakkers Leo P. Kouwenhoven
author_sort	Sebastian Heedt
title	Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices
title_short	Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices
title_full	Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices
title_fullStr	Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices
title_full_unstemmed	Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices
title_sort	shadow-wall lithography of ballistic superconductor–semiconductor quantum devices
publisher	Nature Publishing Group
series	Nature Communications
issn	2041-1723
publishDate	2021-08-01
description	Advanced fabrication techniques enable a wide range of quantum devices, such as the realization of a topological qubit. Here, the authors introduce an on-chip fabrication technique based on shadow walls to implement topological qubits in an InSb nanowire without fabrication steps such as lithography and etching.
url	https://doi.org/10.1038/s41467-021-25100-w
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Shadow-wall lithography of ballistic superconductor–semiconductor quantum devices

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