Junctionless Poly-Si Nanowire FET With Gated Raised S/D

The short-channel effect (SCE) is an important issue in CMOS technology. In this paper, a junctionless (JL) poly-Si nanowire FET (NW-FET) with gated raised source/drain (S/D) was demonstrated to suppress the SCE. The gated raised S/D structure enhances the control of the channel by the gate. Therefo...

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Bibliographic Details
Main Authors: Lun-Chun Chen, Mu-Shih Yeh, Ko-Wei Lin, Min-Hsin Wu, Yung-Chun Wu
Format: Article
Language:English
Published: IEEE 2016-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/7370877/