Measurement of six degree bi-directional motion error of linear stage
We proposed the measurement system of the six degree of motion errors which is based on distance measurement by the laser interferometer. The system has six parallel laser beams and six ball lenses as the retroreflectors on the linear stage, which reflect the corresponding laser beams. In the propos...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
|
| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201815306007 |