Fabry-Perot Interferometer Based on an Aluminum-Polyimide Composite Diaphragm Integrated With Mass for Acceleration Sensing
This study proposes a miniature and highly sensitive Fabry-Perot interferometer (FPI) based on aluminum - polyimide diaphragm integrated with a mass block for acceleration sensing. The composite diaphragms with a radius and thickness of 3.5 mm and 630 nm are manufactured by Micro-ElectroMechanical S...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2019-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8936896/ |