Multi-parameter sensing using thickness shear mode (TSM) resonators – a feasibility analysis
<p>Multi-parameter sensing is examined for thickness shear mode (TSM) resonators that are in mechanical contact with thin films and half-spaces on both sides. An expression for the frequency-dependent electrical admittance of such a system is derived which delivers insight into the set of mate...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2019-04-01
|
| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://www.j-sens-sens-syst.net/8/133/2019/jsss-8-133-2019.pdf |