Morphological and Structural Characterization of Magnetron-Sputtered Aluminum and Aluminum-Boron Thin Films
In microelectronic mechanical systems applications, sputtered aluminum thin films may have large roughness, which promotes the optical degradation and electromigration. This challenge motivated the present research, where magnetron sputtering equipped by radio frequency allowed for preparing aluminu...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/11/5/492 |