Dependence-Analysis-Based Data-Refinement in Optical Scatterometry for Fast Nanostructure Reconstruction
Optical scatterometry is known as a powerful tool for nanostructure reconstruction due to its advantages of being non-contact, non-destructive, low cost, and easy to integrate. As a typical model-based method, it usually makes use of abundant measured data for structural profile reconstruction, on t...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-09-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/9/19/4091 |