Systematical Study of the Basic Properties of Surface Acoustic Wave Devices Based on ZnO and GaN Multilayers

Recently, surface acoustic wave (SAW) devices based on layered structures are a popular area of research. Multilayered structures, including ZnO and GaN, have shown great performance and can be applied in diverse fields. Meanwhile, thin films, such as AlGaN and n-ZnO, can be added to these structure...

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Bibliographic Details
Main Authors: Junyao Shen, Sulei Fu, Rongxuan Su, Huiping Xu, Fei Zeng, Cheng Song, Feng Pan
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Electronics
Subjects:
ZnO
GaN
Online Access:https://www.mdpi.com/2079-9292/10/1/23